ANALYSIS OF HYSTERESIS MEASUREMENTS IN EPITAXIAL SRO/PZT/PT CAPACITOR STRUCTURES
J. Realpe, A. Cortés, E. Delgado, W. Lopera, and P. Prieto
Resumen
P-E hysteresis loops were measured in SrRuO3/Pb(Zr0.52Ti0.48)O3/Pt capacitor structures
grown on (100) SrTiO3 single-crystal substrates using high-oxygen pressure on
axis dc-sputtering technique. PZT films were grown by rf magnetron sputtering in a pure
oxygen atmosphere. Capacitor structures with electrode areas of 5.0 × 10−4 and 6.5 × 10−3cm2 revealed clear hysteretic behavior. These hysteresis loops displayed asymmetric
behavior due to the asymmetry of the electrodes used in SRO/PZT/Pt capacitors. We
fitted hysteresis curves measured on capacitors based upon 40-nm thick PZT thin films
by using a stochastic model of hysteresis proposed by P´al permitting the extraction of
information on their ferroelectric properties.