We grew rhombohedrally distorted BiFeO3 and hexagonal YMnO3 thin films on Pt/TiO2/SiO2/Si substrates via RF agnetron sputtering technique in a pure oxygen atmosphere. BiFeO3 and YMnO3 targets were self-made by the usual solid-state reaction method. We investigated the effects of deposition temperature upon crystalline structure, surface morphology, magnetization, and electrical polarization of BiFeO3 and YMnO3 thin films. The crystalline structure was studied by X-ray diffraction, and the topography of films surface was analyzed by atomic force microscopy. We also conducted measurements of ferroelectric and ferromagnetic hysteresis loops to study the electrical and magnetic behavior of the samples. Polarization, as a function of electric field in capacitor structures based on our BiFeO3 films, shows hysteretic behavior with coercive field of 54 kV/cm and a remanent polarization of 1.2µC/cm2 and saturation polarization of 3.5 µC/cm2. Magnetization measurements of the BiFeO3 films evidence weak Ferromagnetism that can be related to the presence of a small quantity of ferromagnetic impurities.